Used CHA SEC-1000-RAP

Inventory Number: 55643
Now (USD): $55,000.00

Dual Gun E Beam Evaporator. Used thin film deposition system. Two single pocket e-guns with individual power and sweep control. Inficon IC4 Plus deposition rate monitor. Temescal CV-8 E beam power supply. Auto-Tech II valve controller.  25.5 in. diameter water cooled stainless steel bell jar. CTI cryopump with compressor and roughing pump. Does not have substrate fixturing currently.

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Used CHA SEC-600-RAP

Inventory Number: 56242
Now (USD): $55,000.00

E-Beam Evaporator. Used thin film deposition system. High vacuum electron beam deposition system. 19 in. dia. water cooled bell jar. 6 pocket e-gun with SR-10 power supply and sweep controls. Inficon IC/4 crystal deposition monitor. CTI on board cryopump with compressor and roughing pump. Auto-Tech II vacuum controller. Fixture rotation controller and motor but does not include substrate fixturing. Heater power supply but no heaters currently installed.

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Used CHA SE-1000-RAP

Inventory Number: 56323
Now (USD): $55,000.00

Multisource E Beam and Thermal Evaporation System for Optical Films and Oxygen Reactive Evaporations. Used thin film deposition system. Inficon IC-4 Plus rate and deposition controller. Six pocket electron beam source with SR-10 E-Beam power supply. Parts for optical monitor with system but not tested or covered under warranty. Two outrigger style filament resistance sources with 6 kW SCR controlled power supply. Automatic valve sequence controller. 25 in. dia. x 30 in. tall water cooled bell jar. Pressure control system for oxygen reactive evaporations. VHS-10 high speed diffusion pump with roughing pump. Quartz substrate heaters. Slide type fixturing for lift off process. Does not use substrate rotation type fixturing.

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Used CHA Bell Jar

Inventory Number: 57144
Now (USD): $950.00

Stainless steel. 25.75 in. OD, 29 in. tall.

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Used CHA SE-1000

Inventory Number: 57367
Now (USD): $55,000.00

E-Beam Evaporator Deposition System. Used thin film deposition system. Electron beam high vacuum deposition system. Inficon IC4 crystal deposition rate monitor. Temescal CV-14 14 kW E-Beam power supply. Four pocket E-Gun. CTI cryopump with compressor and roughing pump. Quartz lamps for substrate heating. Automatic or manual vacuum valve sequencing. Water cooled stainless steel 25 in. dia. bell jar with hoist.

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Used CHA SE-600-RAP

Inventory Number: 57536
Now (USD): $45,000.00

Single Pocket E-Beam Evaporator. Used thin film deposition system. Inficon IC6000 crystal deposition monitor. Triple dome planetary for 3 in. wafers. Automatic or manual valve control. Diffusion pump and roughing pump. Motorized hoist. 19 in. dia. bell jar. Temescal CV-8 E-beam power supply with controls. Single pocket e-gun with shutter.

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Used CHA SE-600

Inventory Number: 57550
Now (USD): $49,500.00

High Vacuum E-Beam Evaporation System. Used thin film deposition system. PVD physical vapor deposition system. 19 in. dia. water cooled bell jar. Triple dome planetary fixturing currently configured for 3 in. dia. wafers. Inficon IC6000 crystal deposition rate monitor. Automatic valve sequencer. Four pocket E-gun with manual rotation control. Does not have auto pocket sequencer, manual only. Temescal CV-8 E-Beam power supply with controls. System uses a Varian VHS-6 diffusion pump for high vacuum. Roughing pump included.

Product Details

Used CHA SE-600-RAP

Inventory Number: 57558
Now (USD): $39,500.00

Multiple Thermal Evaporation Source High Vacuum Deposition System. Used thin film deposition system. Physical vapor deposition system. 19 in. dia. water cooled bell jar with hoist. Inficon crystal deposition rate monitor. System has four thermal sources for evaporation of different materials. Source is selected via push button on front panel. System has controls for substrate heaters but none are installed. No substrate fixturing with system but rotation motor and controller are installed. Automatic valve sequencer. System uses a Varian VHS-6 high speed diffusion pump for high vacuum. Includes vacuum pump. 208V, 3 Ph, 60 Hz.

Product Details

Used CHA Thermal Evaporator

Inventory Number: 59498
Now (USD): $4,500.00

System is not complete, only what is in photos. 18 in. water cooled stainless steel bell jar with hoist. Varian VHS-6 diffusion pump. Sold As Is untested.

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