Mask Aligner and Exposure System.
350W lamp housing with power supply.
Final Lense: 6-1/2 in. x 6-1/2 in.
Precision alignment stage.
Mask Holder: 4 in. x 4 in. with 2-1/8 in. x 2-1/8 in. substrate holder.
Exposure timer.
Single StereoZoom microscope for alignment, not split field.
120V, 50/60 Hz.
Inventory#:
53380
CO2 Precision Surface Cleaning System.
For removing micron and submicron particulate and organic contamination using carbon dioxide. When aimed at a contaminated surface the CO2 snow particles dislodge particles and remove thin film organic residues.
Removing post-etch veils by momentum transfer or metal lift-off by thermal contraction and momentum transfer.
Removes organic film by solvation. Cassette to cassette operation.
Inventory#:
52338
Production Moment Balance System.
Mass balanced beam type load cell designed to eliminate many potential sources of error.
No PC or software with system.
Range: 20,000 gram inches.
Total capacity: 200,000 gram inches.
Inventory#:
51931
Variable Frequency RF Plasma Generator.
Frequency Range: 1.765 MHz to 2.165 MHz.
Max. Output Power: 5000W. Water cooled.
Generator control is via 15 pin analog user port with advanced
frequency control parameters available via 9 pin serial interface.
400/480V, 3 Ph, 50/60 Hz, CE.
Model No.: 3155083-11A
Inventory#:
51149
Low Z DC Magnetron Power Supply.
Power: 0 to 10 kW.
Voltage: 0 to 800V or Current: 0 to 25A.
Ramping programmable 0 to 99 min.
Blank front panel, user inputs/outputs for RS-232 or analog controlling.
Photo for Representation Only
Inventory#:
40801
DC Magnetron Power Supply.
Blank front panel, operated via user input/output ports, RS232 or analog control.
Maximum power output: 10 kW.
Inventory#:
45229
DC Magnetron Power Supply.
Blank front panel, operated via user input/output ports, RS232 or analog control.
Max. Power Output: 10 kW.
Inventory#:
52331
DC Magnetron Power Supply.
Blank front panel, operated via user input/output ports, RS232 or analog control.
Max. Power Output: 10 kW.
Inventory#:
52330
No control panel, requires external control input.
Power: 0 - 10 kW. Standard Z, stand alone unit.
Model 3152012-041AB. 208V, 3 Ph, 50/60 Hz.
Inventory#:
52400
DC Magnetron Sputter Power Supply.
Remote interface panel for control. Standard Z model.
Power Output: 10 kW. Ramp timer: 0 to 99.0 min., programmable.
Runtime continuous or 0 to 99.0 min.
Forced air cooling.
208V, 3 Ph, 50/60 Hz.
Inventory#:
52332
DC Magnetron Sputtering Power Supply.
Power: 0 to 5 kW. Voltage: 0 to 1000V or Current: 0 to 10A.
Ramping time is programmable 0 to 99 mins.
Active front panel and user inputs/outputs for RS232 or analog.
Inventory#:
47506
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any purpose without prior written permission.
Mask Aligner and Exposure System.
350W lamp housing with power supply.
Final Lense: 6-1/2 in. x 6-1/2 in.
Precision alignment stage.
Mask Holder: 4 in. x 4 in. with 2-1/8 in. x 2-1/8 in. substrate holder.
Exposure timer.
Single StereoZoom microscope for alignment, not split field.
120V, 50/60 Hz.
Inventory#:
53380
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