Mask Aligner and Exposure System. 350W lamp housing with power supply. Final Lens: 6-1/2 in. x 6-1/2 in. Precision alignment stage. Mask Holder: 4 in. x 4 in. with 2-1/8 in. x 2-1/8 in. substrate holder. Exposure timer. Single StereoZoom microscope for alignment, not split field. 120V, 50/60 Hz.
Inventory#:
53380
CO2 Precision Surface Cleaning System.
For removing micron and submicron particulate and organic contamination using carbon dioxide. When aimed at a contaminated surface the CO2 snow particles dislodge particles and remove thin film organic residues.
Removing post-etch veils by momentum transfer or metal lift-off by thermal contraction and momentum transfer.
Removes organic film by solvation. Cassette to cassette operation.
Inventory#:
52338
Spectrophotometer. Designed to measure the reflectance, transmittance and absorbance of samples in the wavelength range of 115nm to 300nm. Currently configured to measure in a nitrogen environment but can be configured for vacuum with addition of pumps. 0.75 meter monochromator. Focused deuterium lamp. Includes PC.
Inventory#:
54947
Vibrating Sample Magnetometer with
Auto-Sample Rotation and Temperature Options.
Comprehensive control and analysis routines for production and research.
4 in. dia. pole electromagnet tapered to 2 in. for up to 18,000 Oe.
Signal processor chassis with card to control VSM vibrator, field control card, EMU signal lock-in amplifier and output filter, A/D converters for field and EMU.
Automatic sample rotation.
Liquid nitrogen/argon gas sample chamber designed for magneto-optic thin film compenstation temperature experiments and temperature studies of other magnetic materials.
Inventory#:
50765
Production Moment Balance System.
Mass balanced beam type load cell designed to eliminate many potential sources of error.
No PC or software with system.
Range: 20,000 gram inches.
Total capacity: 200,000 gram inches.
Inventory#:
51931
Precision Dicing Saw.
Precision dicing, cutting and slotting for the semiconductor and microdevices industries.
Process parameters are totally programmable
through interactive menu-driven screens. 6 in. dia. vacuum chuck.
Air bearing spindle with 2 in. dia. blade and maximum speed of 40,000 rpm.
Video viewing of alignment and cutting.
Date of Mfg.: 9/2004.
Inventory#:
54731
Precision Dicing Saw.
Automated process control.
Optimal combination of kerf quality, throughput and yield.
For wafers up to 6 in. dia. 2 in. dia. spindle with programmable speed from 4,000 rpm to 40,000 rpm.
Video viewing of alignment and cutting.
Date of Mfg.: 6/2004. 208V, 1 Ph, 50/60 Hz, 15A.
Inventory#:
54880
Precision Dicing Saw.
Automated process control. Optimal combination of kerf quality, throughput and yield.
For wafers up to 6 in. dia. 2 in. dia. spindle with programmable speed from 4,000 rpm to 40,000 rpm.
Video viewing of alignment and cutting.
Date of Mfg.: 6/2004. 208V, 1 Ph, 50/60 Hz, 15A.
Inventory#:
54883
Variable Frequency RF Plasma Generator.
Frequency Range: 1.765 MHz to 2.165 MHz.
Max. Output Power: 5000W. Water cooled.
Generator control is via 15 pin analog user port with advanced
frequency control parameters available via 9 pin serial interface.
400/480V, 3 Ph, 50/60 Hz, CE.
Model No.: 3155083-11A
Inventory#:
51149
Variable Frequency RF Plasma Generator.
Frequency Range: 1.765 MHz to 2.165 MHz.
Max. Output Power: 3000W. Water cooled. Generator controls via 15 pin analog user port with
advanced frequency controls available via 9 pin serial interface. 208V, 3Ph, 50/60Hz.
Inventory#:
54267
DC Magnetron Power Supply.
Blank front panel, operated via user input/output ports, RS232 or analog control.
Maximum power output: 10 kW.
Inventory#:
45229
DC Magnetron Power Supply.
Blank front panel, operated via user input/output ports, RS232 or analog control.
Max. Power Output: 10 kW.
Inventory#:
52331
DC Magnetron Power Supply.
Blank front panel, operated via user input/output ports, RS232 or analog control.
Max. Power Output: 10 kW.
Inventory#:
52330
No control panel, requires external control input.
Power: 0 - 10 kW. Standard Z, stand alone unit.
Model 3152012-041AB. 208V, 3 Ph, 50/60 Hz.
Inventory#:
52400
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