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Sputtering Systems
Used Sputtering Systems


Refurbished with a 30 Day Right of Return and 3-Month Warranty! (Unless sold "AS-IS" * )

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ANATECH  HUMMER VI-A - NEW ARRIVAL!! -- $4,950

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Used  ANATECH  HUMMER VI-A  Cold Deposition/Etch Sputter Coater with Carbon Accessory. Cold planar magnetron sputtering. Microscope stub holder accommodates up to 3.25 in. dia. substrates. Self contained two stage vacuum pump. Carbon evaporation accessory. Does not have deposition monitor, operates on timed mode. 115V, 60 Hz, 6A. No Gold Target.     Inventory#: 55453

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EMITECH  K550X -- $3,950 NO TARGET

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Used  EMITECH  K550X  Sputter Coater. LCD display of parameters. Single cathode system 60 mm dia. Specimen Stage: 60 mm dia. No target with system. Includes vacuum pump.     Inventory#: 54983

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EMITECH  K650X -- $5,250 NO GOLD TARGETS

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Used  EMITECH  K650X  Large Sample Sputter Coater. Triple target sputtering (3 x 80 mm dia.). No gold targets with system. LCD display of parameters. Low energy cool system. Rotating specimen stage: 155 mm dia. Includes vacuum pump.     Inventory#: 54982

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ION BEAM SPUTTER TARGET  - -- $1,500

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Used  ION BEAM SPUTTER TARGET  -  Target rotation system for ion beam sputtering system. Holds four 6 in. dia. targets. 10 in. ISO flange. Synchronous stepping motor, no controller. Length from flange to end of target 20 in.     Inventory#: 50679

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MRC  603 -- $49,000

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Used  MRC  603  3 Target RF/DC Sputtering System with RF Etch and Load Lock Chamber. System upgraded to PC controller capable of RF or DC sputtering but currently configured with three 4-3/4 in. x 14-7/8 in. DC cathodes. RF etch platform. 3 gas inputs controlled by MFC, previous gas used: O2, N2, AR. Advanced Energy MDX DC power supply. CTI-8 cryopump with compressor and roughing pump. RGA available at additional cost.     Inventory#: 54177

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MRC  603 -- $49,000

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Used  MRC  603  3 Target RF/DC Sputtering System with RF Etch and Load Lock Chamber. System upgraded to PC controller capable of RF or DC sputtering but currently configured with three 4-3/4 in. x 14-7/8 in. DC cathodes. RF etch platform. 3 gas inputs controlled by MFC, previous gas used: O2, N2, AR. Advanced Energy MDX DC power supply. CTI-8 cryopump with compressor and roughing pump. RGA available at additional cost.     Inventory#: 54356

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MRC  603-II -- $69,000

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Used  MRC  603-II  Side Sputtering System w/Etch Capabilities. Currently configured with 3 D.C. Magnetron Cathodes (inset cathodes). Alcatel 2033 Roughing Pump. CTI-8 Cryopump. 1500W RF Generator. Automatic or manual controls for vacuum system and sputtering process. 4 process gas capability. Average cycle time: 13.0 minutes. Typical target utilization: Ti-W Inset 35 percent, Al Inset 50 percent. Cathode size: 4-3/4 in. x 14-7/8 in. Sputter etch: 1.5 kW RF. CRT screen monitoring, keyboard parameter control, full automation. With manuals. 208V, 60 Hz, 3 Ph, 110A.     Inventory#: 21983

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MRC  943 - NEW ARRIVAL!! -- $115,000

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Used  MRC  943  Sputtering System. More information to come contact us for details. Current photo for representation only. More photos to come.      Inventory#: 55145

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* = Warranty terms only apply to non "as-is" items. "As-Is" items will have different return and warranty conditions. Contact us for details.

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