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BALZERS
1131 -- $165,000
Used
BALZERS
1131
Large Box Coater Evaporation System.
Khan computer controller. Dual cryo pumps.
Box Size: 48 in. L x 59 in. at widest point x 63 in. H.
Currently configured with inductive thermal evaporation source.
Can easilty be configured with other types of evaporation sources.
System includes autoload option.
Very Nice Condition.
Inventory#:
47626
Used
BALZERS
BAK 640
High Vacuum E-Beam Box Coater.
Dual E-Gun system, large single pocket and small 4 pocket.
Diffusion pumped high vacuum system.
Vacuum Chamber Dimensions: 29 in. Widest Point x 32 in. D x 35 in. H.
Includes roughing pump.
$39,000 AS IS.
Inventory#:
54735
Used
BALZERS
BAK 760
High Capacity High Vacuum Evaporation System.
Kahn computer controller upgrade.
Currently configured for induction evaporation sources but can be modified to different sources at a cost.
Useable chamber area: 888 mm W, 923 mm H, 950 mm D.
Water cooled chamber walls.
Inventory#:
47652
Used
BALZERS
BAK 760
Dual Source Box Coater.
Resistive thermal source and inductive evaporation source.
IC6000 crystal deposition monitor with a dual crystal head.
Heater controls but no substrate heaters.
Austin Scientific Cryo-Plex 16 cryopump with compressor.
Usable chamber area: 888 mm wide,
923 mm height, and 950 mm deep.
Water cooled chamber walls.
Inventory#:
50204
Used
CHA
MARK 40 ISS
Electron Beam Evaporator with Source Isolation Chamber.
Model SR-10 10 kW electron beam power supply with digital readouts.
With the source isolation chamber, substrate loading and unloading is done with the source
chamber remaining in high vac.
Inficon IC5 Deposition Controller for fully automated operation.
CTI cryopump, also includes system roughing pump.
Chamber Size: 26 in. x 26 in. dia.
Ultimate Vacuum: 10^-8 torr.
Quartz substrate heaters. 6 pocket e-gun. Single 24 in. dia. lift-off dome with rotation controls.
Inventory#:
51810
Used
CHA
MARK 40 ISS
E-Beam Evaporator Configured for Lift-Off.
System can run in semiautomatic or manual modes. Inficon IC5 crystal deposition controller with floppy drive for recipe storage.
Can store up to 50 processes and 250 total layers in internal memory. Isolation valve above source to increase pump down speeds. SR-10 e-beam power supply with controls. 6 pocket e-gun. Quartz substrate heaters with digital controls.
Autotech IV vacuum control, automatic or manual operation. Single 24 in. dia. lift-off dome with rotation control. Cryopump with compressor and roughing pump.
Inventory#:
53322
Used
CHA
SE-600-RAP
Multisource Thermal Evaporator.
18 in. dia. quartz bell jar with implosion guard and hoist.
Auto-Tech II automatic valve controller.
CTI CryoPump with compressor and roughing pump. Vacuum gauge.
Deposition control is manual and there is no rate monitor at this price.
Refurbished and repainted.
Inventory#:
48648
Used
EDWARDS
E306A
Compact Thermal Evaporator. Laboratory size self contained thermal evaporator. 12 in. dia. quartz bell jar with implosion shield. Diffusion and roughing pump located in base. Built-in gauges and power supply. 220V, 60 Hz.
Inventory#:
55114
Used
INTERNATIONAL VACUUM
303030
E-Beam Box Coater.
AS IS. Not Complete. 4 pocket E-Gun in chamber.
Drum Type Substrate Fixturing: 28 in. dia. x 24 in.
Large Varian diffusion pump.
Inficon IC6000 deposition monitor.
Chamber Inside Dimensions: 30 in. x 30 in. x 30 in.
Inventory#:
53837
Used
IVI
BOX COATER
48 in. Thermal Evaporator.
PC Controller. Sycon STC-200 Deposition Controller.
Inside Pill Shape Dimensions: 48 in. L x 48 in. W x 48 in. H.
Baseplate has 23 - 1 in. feedthroughs, 5 - 1-1/4 in. feedthroughs and 1 - 8 in. port. 6 - 2-1/2 in. ports.
13-1/2 in. port where motor drive comes into top of chamber.
IVI 8930 Model 2205 Resistance Power Supply.
Cryopump with compressor and rough pump.
208V, 3 Ph, 60 Hz.
Inventory#:
43794
PLASMATRON
ELECTRON BEAM EVAPORATOR -- $69,000 NICE SYSTEM
Used
PLASMATRON
ELECTRON BEAM EVAPORATOR
Automatic or manual operation modes.
Four pocket electron gun 18cc crucibles.
Syscan STC-200 deposition rate controller for auto operation.
Automatic Cryo pump regeneration.
Temescal Simba 2 electron gun power supply.
Chamber 20 in. Across x 28 in. High x 20 in. deep.
Variable speed rotation control.
Inventory#:
42592
Used
TEMESCAL
BJD-1800
Box Coater with Eight Thermal Evaporation Sources.
Evaporator with eight resistive filament sources.
Inficon IC4 deposition rate controller.
Inside Chamber Dimensions: 24 in. L x 25 in. W 27-1/2 in. H.
Water cooled chamber with highvac gate valve over sources.
High vacuum cryopump with compressor and roughing pump and Regen control.
Automated vacuum control.
Motor control for substrate rotation. Dual shutter controller.
Inventory#:
55134
Used
TEMESCAL
FC-1800
E-Beam Evaporator.
Older unit but it will be repainted and reconditioned.
Deposition monitor.
CTI-8 Cryopump with rough pump.
Load lock for loading.
Multipocket gun with power supply and controls.
No substrate holder included.
Inventory#:
39282
Used
TEMESCAL
FC-1800
Load-Locked Electron Beam Evaporator with Substrate Heaters.
This fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw distance. Cryo pumped high vacuum system with roughing pump.
4 pocket gun with Temescal Simba power supply.
Inficon IC4 Desposition monitor.
Bell Jar: 19-1/2 in. ID.
Single substrate dome 17 in. dia. with rotation control.
Includes substrate heaters. Auto valve sequencer.
Inventory#:
53808
Used
UNAXIS
BAK 1131
Large Box Coater Evaporation System.
Khan NT controller.
Dual CTI-400 Cryo Pumps.
Box Size: 48 in. L x 59 in. at widest point x 63 in. H.
System currently configured with inductive evaporation
sources but can be modified to any standard source.
System includes autoload option.
System manufactured in 2001, very clean nice condition.
Inventory#:
47362
Used
UNAXIS
BAK EVO (760)
Multiple Source Thermal Evaporator.
Proven modular design box coater system can be easily configured for many applications.
Currently configured with 3 shutters and 8 water cooled power feed throughs.
3 Inficon XTC crystal deposition monitors each controlled via Khan computer.
Substrate carrier for 8 in. dia. substrates. Khan process control with user friendly graphics.
Fully integrated multi-tasking PC-based control system, monitors all process data, manages process recipes with built-in failure diagnostics.
CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down.
Mfg. 2001.
Inventory#:
47000