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 Used OXFORD INSTRUMENTS  PLASMALAB SYSTEM 100

Refurbished with a 30 Day Right of Return and 3-Month Warranty! (Unless sold "AS-IS" * )

 OXFORD INSTRUMENTS_PLASMALAB SYSTEM 100.jpg Photo: OXFORD INSTRUMENTS PLASMALAB SYSTEM 100

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Description: OXFORD INSTRUMENTS - PLASMALAB SYSTEM 100
Load Locked RIE Reactive Ion Etching System. System controlled and monitored by PC. Turbo pumped load lock. 8 in. dia. bottom electrode. Shower head style gas delivery. Advanced Energy RFX-600A 13.56 MHz 600W RF generator. Turbo pump on the load lock and one on the process chamber. Includes roughing pump.  
 
Price: $75,000
Inventory Number: 56082
Click for fullsize OXFORD INSTRUMENTS_PLASMALAB SYSTEM 100.jpg Photo: OXFORD INSTRUMENTS PLASMALAB SYSTEM 100 Click for fullsize OXFORD INSTRUMENTS_PLASMALAB SYSTEM 100.jpg Photo: OXFORD INSTRUMENTS PLASMALAB SYSTEM 100
Click for fullsize OXFORD INSTRUMENTS_PLASMALAB SYSTEM 100.jpg Photo: OXFORD INSTRUMENTS PLASMALAB SYSTEM 100.. Click for fullsize OXFORD INSTRUMENTS_PLASMALAB SYSTEM 100.jpg Photo: OXFORD INSTRUMENTS PLASMALAB SYSTEM 100..
Click for fullsize  OXFORD INSTRUMENTS_PLASMALAB SYSTEM 100.jpg Photo: OXFORD INSTRUMENTS PLASMALAB SYSTEM 100.. Click for fullsize  OXFORD INSTRUMENTS_PLASMALAB SYSTEM 100.jpg Photo: OXFORD INSTRUMENTS PLASMALAB SYSTEM 100..

* = Warranty terms only apply to non "as-is" items. "As-Is" items will have different return and warranty conditions. Contact us for details.

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