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225 Willow Brook Rd. Freehold, NJ, 07728-6729 USA

Used OXFORD PLASMALAB 80 Plus

Refurbished with a 30 Day Right of Return and 3-Month Warranty! (Unless sold "AS-IS" * )

OXFORD_PLASMALAB 80 Plus.jpg Photo: OXFORD PLASMALAB 80 Plus

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Description:	OXFORD - PLASMALAB 80 Plus Turbopumped Reactive Ion Etch RIE System. PC controller with graphical user interface. Excellent across chamber uniformity. 500W, 13.56 MHz RF generator. Turbopumped chamber, includes roughing pump. Four gas inputs controlled via MFC. Previous gas used SF, O2, CHF3, N2. Shower head gas delivery method.
Price:	$75,000
Inventory Number:	55693

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* = Warranty terms only apply to non "as-is" items. "As-Is" items will have different return and warranty conditions. Contact us for details.

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